Ultra-thin Graphene/Polymer Layered Composite Membranes for NEMS applications
نویسندگان
چکیده
Single layer chemical vapor deposited (CVD) graphene has shown great promise in enabling Micro and Nanoelectromechanical Systems (MEMS/NEMS) that can outperform current silicon-based state of the art. However, current methods in forming single layer graphene MEMS devices result in low yields due to capillary effects acting on the suspended material during the graphene transfer process. In addition, the suspended membranes that survive often suffer from a distorted topography due to transfer polymer residue thereby limiting the in-plane span as well as poor device fabrications reproducibility.
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